No. Chamber Label Pumping Speed (L/s) Pump model No Load Pressure (Pa) Normal Load Pressure (Pa)
1 MIR 18 SOGEVAC SV65 BI FC, Leybold 135 135
2 RFQ1 / / / /
3 RFQ2 250 SpliteFlow310, Pfeiffer / /
4 FLT / / 0.22 6.93
5 AC 200 SpliteFlow310, Pfeiffer 1 × 10–4 1.55 × 10–3
6 ST&DT 300 HiPace 300, Pfeiffer 1.52 × 10–5 4.76 × 10–5
7 MR 300*3 HiPace 300, Pfeiffer 8.57 × 10–6 8.47 × 10–6