Abstract
A hydrogen sensing transistor fabricated by a heterojunction bipolar
transistor (HBT) with an extended base (EB) formed by a
metal-semiconductor-metal (MSM) hydrogen sensor is reported. The power
consumption in stand-by mode is smaller than 2 μW. Common-emitter
characteristics show that the sensing base (collector) current gains at
25℃ in 0.01%, 0.1%, and 1% H2/N2 are as high as 75 (512), 134, (977),
and 233 (2.89 104), respectively. Low-power consumption and
high-sensitive gains are indicative that our HBT together with
planar-type MSM sensor is very promising for applications to hydrogen
sensing transistors using one voltage source.